双(三甲基甲硅烷基)氨基锂

Description

Lithium bis(trimethylsilyl)amide · CAS 4039-32-1 · C6H19NSi2. UNII H36C68P1BH. Boiling Point: 125 °C; Boiling Point: 125 °C @760 [mm Hg]; Flash Point: 48 °F (NFPA, 2010).

Identification

CAS Registry Number	4039-32-1
PubChem CID	13838
Molecular formula	C6H19NSi2
IUPAC name	[dimethyl-(trimethylsilylamino)silyl]methane
UNII (FDA)	H36C68P1BH

Computed Descriptors

Molecular Weight	161.39
Hydrogen Bond Donor Count	1
Hydrogen Bond Acceptor Count	1
Rotatable Bond Count	2
Exact Mass	161.10560268
Monoisotopic Mass	161.10560268
Topological Polar Surface Area	12
Heavy Atom Count	9
Formal Charge	0
Complexity	76.2

Physical & Chemical Properties

Boiling Point	125 °C
Boiling Point	125 °C @760 [mm Hg]
Flash Point	48 °F (NFPA, 2010)
Flash Point	27 °C
Flash Point	81 °F (27 °C) closed cup
Density	0.7741 g/cu cm at 25 °C
Density	0.76 @25 °C
Vapor Pressure	13.8 [mmHg]
Vapor Pressure	13.8 mm Hg at 25 °C
Vapor Pressure	13.8 [mm Hg] @25 °C

Physical description & handling notes

• Hexamethyl disilazane appears as a liquid. May be toxic by ingestion. Irritates skin and eyes. Vapors are heavier than air. May emit highly toxic nitrogen oxide fumes when heated to decomposition. Used to make other chemicals.
• Liquid; Other Solid
• Colorless liquid
• Ammonia-like odor
• 14 °C (closed cup) /from table/
• Soluble in acetone, benzene, ethyl ether, heptane, perchloroethylene

Regulatory Status

Regulatory & Food Contact	FDA Cumulative Estimated Daily Intake (CEDI): FCS
GHS notification summary	5.8% (35 / 606)

GHS Hazard Classification

GHS notification summary	5.8% (35 / 606)
Reported hazard statements	H225 (93.7%), H302, H332 (27.1%), H311 (88.6%), H314 (31.8%), H412 (85.5%), H320, H331

Documented Uses

• Used to deactivate chromatography support materials and to promote adhesion of photoresists in the electronics industry; [HSDB]
• Semiconductor Manufacturing [Category: Industry]
• Deactivation of chromatographic support materials. In electronic industry as an adhesion promoter for photoresists on silicon.
• The substance is used as a chemical intermediate in the production of siloxane polymers.
• Semiconductor and photovoltaic agent
• Processing aids not otherwise specified

Synonyms

Hexamethyldisilazane; 999-97-3; HMDS; Bis(trimethylsilyl)amine; 1,1,1,3,3,3-Hexamethyldisilazane; Hexamethylsilazane; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine; Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-; TSL 8802; hexamethyl disilazane; Disilazane, 1,1,1,3,3,3-hexamethyl-; SZ 6079; DTXSID2025395; H36C68P1BH; NSC-93895; DTXCID805395

Frequently Asked Questions

What are the CAS number and molecular formula of Lithium bis(trimethylsilyl)amide?

CAS 4039-32-1; molecular formula C6H19NSi2; molecular weight — g/mol.

What other names is Lithium bis(trimethylsilyl)amide known by?

Hexamethyldisilazane, 999-97-3, HMDS, Bis(trimethylsilyl)amine, 1,1,1,3,3,3-Hexamethyldisilazane, Hexamethylsilazane.

What is the regulatory status of Lithium bis(trimethylsilyl)amide?

Documented regulatory listings: FDA Cumulative Estimated Daily Intake (CEDI): FCS.

Is Lithium bis(trimethylsilyl)amide classified as hazardous?

5.8% of GHS notifications report no hazard classification (35 of 606).

What are the key physical properties of Lithium bis(trimethylsilyl)amide?

Boiling Point: 125 °C; Boiling Point: 125 °C @760 [mm Hg]; Flash Point: 48 °F (NFPA, 2010); Flash Point: 27 °C.

Facts on this page are taken from PubChem (US National Library of Medicine) and Wikidata. Grade-specific data — assay, moisture, particle size, packaging, shelf life — is issued per batch on the COA and is not published here.